Thermally compensated 2-way normally closed (NC) proportional valve designed to maintain accurate and repeatable flow over a wide range of media. Ideal for medical and analytical applications that require precision control and flow up to 56 slpm.

Product Information

The VSO® miniature proportional valve provides enhanced flow control for applications where precise control flow control is required up to 56 slpm. The VSO® miniature proportional valve provides precise flow control of gas in proportion to input current. The valve can be controlled with either DC current or pulse width modulation along with closed loop feedback to deliver optimal system performance. Together with its ability to provide precise control over a wide range of media, the VSO® miniature proportional valve is ideally suited for manufacturers of medical and analytical equipment.
  • Enables precise flow control for improved instrument accuracy
  • Thermally compensated to maintain precise flow over a wide range of media
  • Computer automated calibration and serialization for performance traceability
  • Cleaned for Oxygen and Analytical Service use
  • Proven performance tested to 100 million life cycles
  • RoHS compliant

Typical Applications:

  • Gas Chromatography
  • Mass Spectrometry
  • Ventilators
  • O2 Concentrators and Conservers
  • Anaesthesia Delivery & Monitors
  • Pressure & Flow Control
  • Mass Flow Control

Technical Specifications

Typical Applications:Gas Chromatography, Ventilators, Anesthesia Delivery, Mass Flow Control, Oxygen Conservers & Concentrators, Anaesthesia Delivery & Monitors, Pressure & Flow Control, Mass Flow Control
Orifice Sizes Available:0.010, 0.020, 0.030, 0.040, 0.050, and 0.065" (0.25, 0.51, 0.76, 1.02, 1.27, and 1.65mm)
Thermal Compensation:Thermally Compensated
Control Method:Current or Voltage
Cleanliness:Analytically Clean
Valve Configuration(Type):2 Way Normally Closed
Life (# cycles):Up to 100 Million Cycles
Pneumatic Connection Options:Manifold Mount, Manifold Mount w/ Screens, Barbed, 10-32 threaded
Electrical Connection Options:18" Wire Leads, 4 Pin PC Connection, Quick Spade
Voltage Configurations Available:6.5 VDC, 8 VDC, 11.5 VDC, 13.5 VDC, 20 VDC and 29VDC
Leak Rate: Power Consumption (Watts):2.0 Watts Maximum
Weight:2.2 oz (62.9g)


Flow Rate Range:0 to 56 slpm
Pressure Range:0 to 150 psi


Width:0.63 in (16.51mm)
Height:0.67 in (17.02mm)
Length:1.79 in (45.34mm)

Wetted Materials

Body/Stem Base:360 HO2 Brass, 430 FR Stainless Steel
Seals(Elastomer):FKM, FFKM
All other:300 Series Stainless Steel

Data Sheet

Click to download the Technical Specification of VSO Miniature Proportional Valve