Low flow, 2-way normally closed (NC) proportional valve with integrated thermal compensation to maintain accurate and repeatable flow over a wide range of media.

Product Information

The VSO® Low Flow valve provides enhanced flow control for applications where precise control flow control is required between 0 - 500 sccm. Like the VSO miniature proportional valve, the VSO® Low Flow miniature proportional valve provides precise flow control of gas in proportion to input current. The valve can be controlled with either DC current or pulse width modulation along with closed loop feedback to deliver optimal system performance. Together with its ability to provide precise control over a wide range of media, the VSO® Low Flow miniature proportional valve is ideally suited for manufacturers of Gas Chromatography and Mass Spectrometry equipment.
  • Enables precise low flow (0 - 500 sccm) control for improved instrument accuracy
  • Thermally compensated to maintain precise flow over a wide range of media
  • Computer automated calibration and serialization for performance traceability
  • Cleaned for Oxygen and Analytical Service use
  • Proven performance tested to 10 million life cycles
  • RoHS compliant

Typical Applications:

  • Gas Chromatography
  • Mass Spectrometry
  • Pressure & Flow Control
  • Mass Flow Control

Technical Specifications

Typical Applications: Gas Chromatography, Mass Spectrometry, Pressure & Flow Control, Mass Flow Control


Flow Rate Range: 0 to 500 sccm
Pressure Range:0 to 150 psi
Orifice Sizes Available:.003" (0.076 mm)
Thermal Compensation:Thermally Compensated


Width:0.63 in (16.51mm)
Height:0.67 in (17.02mm)
Length:1.79 in (45.34mm)

Wetted Materials

Body/Stem Base:360 HO2 Brass, 430 FR Stainless Steel
All other:300 Series Stainless Steel
Control Method:Current or Voltage
Cleanliness:Analytically Clean
Valve Configuration(Type):2 Way Normally Closed
Life (# cycles):> 10 Million cycles
Pneumatic Connection Options:Manifold Mount
Electrical Connection Options:18" Wire Leads
Voltage Configurations Available:6.5 VDC, 8 VDC, 12 VDC, 18 VDC, and 24 VDC
Leak Rate: Power Consumption (Watts):2.0 Watts Maximum
Weight:2.2 oz (62.9g)

Data Sheet

Click to download the Technical Specification of VSO-Low Flow Miniature Proportional Valve